Development of Stacked Electrostatic Actuator.
نویسندگان
چکیده
منابع مشابه
A Stacked-type Electrostatic Actuator and Measurement of its Energy Efficiency
We have studied a stacked-type electrostatic actuator by folding two ribbon electrodes in an alternate configuration. The energy efficiency of this type of actuator was investigated using the thick-electrode-part actuator and triangle-shaped actuator. The maximum energy efficiency levels were 30–40% for the thick-electrode-part actuator and 40–50% for the triangle-shaped actuator.
متن کاملRobust Control of an Electrostatic Microelectromechanical Actuator
A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors ... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent po...
متن کاملNonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was ...
متن کاملElectrostatic repulsive out-of-plane actuator using conductive substrate
A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping. Theoretical and simulated results show that the pseudo-t...
متن کاملA Simplified Equivalent Circuit Model of MEMS Electrostatic Actuator
Modeling a MEMS (Micro Electro-Mechanical Systems) electrostatic actuator in electrical domain is important for system simulation of the actuator along with its associated electronics. For instance, an integrated MEMS resonator used in a serial I/O PLL design modeled in electrical domain enables to optimize the system with the rest of the electronics. In this work, we have developed a simplifie...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1993
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.59.1625